A study on the formation and characteristics of the SiOCH composite thin films with low dielectric constant for advanced semiconductor devices - Concepedia

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A study on the formation and characteristics of the SiOCH composite thin films with low dielectric constant for advanced semiconductor devices

43

Citations

10

References

2001

Year

Chang Shil Yang, Kyoung Suk Oh, Jai Yon Ryu, Doo Chul Kim, Jing Shou-yong, Chi Kyu Choi, Heon-Ju Lee, Se Hun Um, H. Y. Chang

Thin Solid Films

References

	Year	Citations

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