Concepedia

Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant Applications

Nigel P. Hacker

MRS Bulletin · 1997 · 85 citations · 3 references

DOI

Concepts

References

3

Oligomeric silsesquioxanes, (HSiO3/2)n

Cecil L. Frye, Ward T. Collins · Journal of the American Chemical Society · 1970 · 174 citations

, , +4

Effects of Si—C Bond Content on Film Properties of Organic Spin‐on Glass

Tadashi Nakano, Kyoji Tokunaga, Tomohiro Ohta · Journal of The Electrochemical Society · 1995 · 22 citations

, , +17

Highly porous interlayer dielectric for interconnect capacitance reduction

Shin-Puu Jeng, Kelly Taylor, Thomas R. Seha et al. · 2002 · 17 citations

, , +17