Chang Shil Yang

Statistics

Publications

Citations

H-Index

Active since

2001

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Chang Shil Yang is an author at Korea Advanced Institute of Science and Technology specializing in natural sciences, materials science, and semiconductor materials.

Publications per year

2001–2005

Publications

A study on the formation and characteristics of the SiOCH composite thin films with low dielectric constant for advanced semiconductor devices

Chang Shil Yang, Kyoung Suk Oh, Jai Yon Ryu et al. · Thin Solid Films · 2001 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +16

Mechanical property of the low dielectric carbon doped silicon oxide thin film grown from MTMS/O2 source

Chang Shil Yang, C. K. Choi · Current Applied Physics · 2005 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +16

1–2 of 2