Optical microscopy of electronic and structural properties of epitaxial laterally overgrown GaN

Abstract

Local strain relaxation as well as inhomogeneous impurity incorporation in epitaxial laterally overgrown GaN (ELOG) structures is microscopically characterized using spectrally resolved scanning cathodoluminescence (CL) and micro-Raman spectroscopy. We correlate the different CL emission spectra with results of spatially resolved Raman-scattering experiments sensing the local strain and free-carrier concentration.