Growth of AlN Films as a Function of Temperature on Mo Films Deposited by Different Techniques

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

<i>A Handbook of Lattice Spacings and Structures of Metals and Alloys</i>

W. B. Pearson, George H. Vineyard · Physics Today · 1958 · 671 citations

Natural Sciences, Materials Engineering, Materials Science +12

Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system

John D. Larson, P. Bradley, S.A. Wartenberg et al. · 2000 · 545 citations

Engineering, Electrical Engineering, Circuit Theory +16

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Stress and microstructure of sputter-deposited thin films: Molecular dynamics investigations

Karl‐Heinz Müller · Journal of Applied Physics · 1987 · 249 citations

Natural Sciences, Materials Science, Physics +17