Concepedia

Low permittivity dielectrics and global planarization for quarter-micron multilevel interconnections

Yoshio Homma, Takeshi Furusawa, Hiroyuki Morishima, H. Sato

Solid-State Electronics · 1997 · 23 citations · 3 references

DOI

Concepts

References

3

Multilevel metal capacitance models for CAD design synthesis systems

J.-H. Chern, Jia Huang, L.A. Arledge et al. · IEEE Electron Device Letters · 1992 · 236 citations

, , +17

Application of Surface Reformed Thick Spin‐on‐Glass to MOS Device Planarization

Shin‐ichi Ito, Yoshio Homma, Eiji Sasaki et al. · Journal of The Electrochemical Society · 1990 · 46 citations

, , +13

Phosphosilicate Glass Passivation for ULSI Cu Metallization

Hideki T. Miyazaki, Hisao Kojima, Atsushi Hiraiwa et al. · Journal of The Electrochemical Society · 1992 · 12 citations · Full text

, , +16