Concepedia

Publication | Closed Access

Fabrication of a spiral microcoil using a 3D-LIGA process

DOI

22

Citations

6

References

2006

Year

Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, Tadashi Hattori
Microsystem Technologies

References

YearCitations

Page 1