Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation

Abstract

To produce three-dimensional and precise microstructures on a small curved surface, we developed a high-precision 3-dimensional X-ray lithography technique. We succeeded in the production of a master of a metallic mold used for mass producing a spiral microcoil with a diameter of 0.48 mm and a length of 1 mm using this technique. An exposure stage controllable by piezoelectric elements and stepping motors was developed. The adhesion between a resist material and a substrate material was enhanced. We investigated about the effect that X-ray diffraction rounds the edge of a pattern, and a process flow was produced. This product has polymethylmethacrylate (PMMA) spiral microstructures with a line width of 10 µm, a thickness of 10 µm, and a pitch of 20 µm.