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Electrical and structural properties of Ta–N thin film and Ta/Ta–N multilayer for embedded resistor

Materials ScienceElectrical EngineeringTa/ta–n MultilayerEngineeringSpecific ResistanceResistorTa–n Thin FilmApplied PhysicsSemiconductor MaterialThin Film DevicesEmbedded ResistorThin FilmsThin Film Process TechnologyMicroelectronicsThin Film Processing