Sensors and Actuators A Physical · 1994 · 21 citations · 5 references
EngineeringElectrical EngineeringMaterials EngineeringElectronic MaterialsSemiconductor DevicesSensorsEpitaxial GrowthIntegrated Circuit DesignIntegrated Circuit DevicesOptical SensorsSensor IntegrationSilicon MaterialsColor SensorsIntegrated Optical SensorsSilicon EpitaxySilicon Optical PropertiesSilicon-based Optical Sensors
5