Low resistance ohmic contacts to amorphous IGZO thin films by hydrogen plasma treatment

Su-Hwan Yang, Jun Young Kim, Min Joo Park, Kwang-Hyuk Choi, Joon Seop Kwak, Han‐Ki Kim, Ji‐Myon Lee

Surface and Coatings Technology · 2012 · 41 citations · 20 references

Concepts

References

20