Continuous profile writing by electron and optical lithography

The manufacture of microlenses by melting photoresist

Daniel Daly, Neil A. Davies · Measurement Science and Technology · 1990 · 243 citations

Natural Sciences, Materials Science, Physics +9

Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists

Michael T. Gale · Optical Engineering · 1994 · 235 citations

Engineering, Materials Engineering, Materials Science +14

Blazed gratings and Fresnel lenses fabricated by electron-beam lithography

Toshiharu Fujita, Hiroshi Nishihara, J. Koyama · Optics Letters · 1982 · 168 citations

Natural Sciences, Materials Science, Physics +13

One-step 3D shaping using a gray-tone mask for optical and microelectronic applications

Y. Oppliger, Pierre Sixt, J. M. Stauffer et al. · Microelectronic Engineering · 1994 · 115 citations

Engineering, Electrical Engineering, Manufacturing Engineering +9

Energy deposition functions in electron resist films on substrates

Mihir Parikh, David F. Kyser · Journal of Applied Physics · 1979 · 101 citations

Engineering, Electrical Engineering, Materials Science +15