Concepedia

Samarium oxide thin films deposited by reactive sputtering: Effects of sputtering power and substrate temperature on microstructure, morphology and electrical properties

Şenol Kaya, H. Karaçalı, Ayhan Çetinkaya, Aliekber Aktağ

Materials Science in Semiconductor Processing · 2015 · 43 citations · 41 references

DOI

Concepts

References

41

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

, , +12

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1975 · 436 citations

, , +17

Stress and strain in polycrystalline thin films

G. C. A. M. Janssen · Thin Solid Films · 2007 · 249 citations

, , +12

Interfacial reactions between thin rare-earth-metal oxide films and Si substrates

Haruhiko Ono, Tooru Katsumata · Applied Physics Letters · 2001 · 236 citations

, , +16