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Samarium oxide thin films deposited by reactive sputtering: Effects of sputtering power and substrate temperature on microstructure, morphology and electrical properties

Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsSubstrate TemperatureReactive SputteringThin FilmsChemical DepositionThin Film Processing