Hot-wire chemical vapor deposition of high hydrogen content silicon nitride for solar cell passivation and anti-reflection coating applications

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

Natural Sciences, Chemistry, Materials Science +17

Formation of Silicon-Based Thin Films Prepared by Catalytic Chemical Vapor Deposition (Cat-CVD) Method

Hideki Matsumura · Japanese Journal of Applied Physics · 1998 · 230 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Influence of gas supply and filament geometry on the large-area deposition of amorphous silicon by hot-wire CVD

Andrea Ledermann, U. Weber, C. Mukherjee et al. · Thin Solid Films · 2001 · 54 citations

Engineering, Materials Engineering, Materials Science +14

High-deposition rate a-Si:H n–i–p solar cells grown by HWCVD

Brent P. Nelson, E. Iwaniczko, A. H. Mahan et al. · Thin Solid Films · 2001 · 40 citations

Engineering, Materials Engineering, Materials Science +16

Al-enhanced PECVD SiNx induced hydrogen passivation in string ribbon silicon

Vijay Yelundur, A. Rohatgi, Abasifreke Ebong et al. · Journal of Electronic Materials · 2001 · 31 citations

Engineering, Materials Engineering, Materials Science +10