Concepedia

Publication | Closed Access

Al-enhanced PECVD SiNx induced hydrogen passivation in string ribbon silicon

DOI

31

Citations

11

References

2001

Year

Vijay Yelundur, A. Rohatgi, Abasifreke Ebong, Andrew M. Gabor, J. I. Hanoka, R.L. Wallace
Journal of Electronic Materials

References

YearCitations

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