Concepedia
MRS Proceedings · 1994 · 49 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryMaterials ProcessingDielectric CeramicsDielectricsFabrication MaterialsFerroelectric MaterialsPolishing OperationsSurface FinishingMechanical PolishingPolishingPolishing Processes
3
Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects
F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations
Engineering, Materials Engineering, Materials Science +17
Semi-empirical modelling of SiO/sub 2/ chemical-mechanical polishing planarization
Peter Burke · 2002 · 18 citations
Engineering, Materials Engineering, Materials Science +16
Characterization of mechanical planarization processes
P. Renteln, Michael E. Thomas, John M. Pierce · 2002 · 11 citations
Engineering, Electrical Engineering, Materials Science +13