Concepedia

Rahul Jairath

RJ

Statistics

Publications

5

Citations

395

H-Index

5

Active since

1990

Affiliations

University of New Mexico(Current)

Rahul Jairath is an author at University of New Mexico specializing in materials science, materials engineering, and natural sciences.

Publications per year

1990–1995

5

Publications

5

Initial study on copper CMP slurry chemistries

Ronald A. Carpio, J. Farkas, Rahul Jairath · Thin Solid Films · 1995 · 142 citations

Engineering, Materials Engineering, Materials Science +7

Selective and blanket copper chemical vapor deposition for ultra-large-scale integration

Ajay K. Jain, Toivo T. Kodas, Rahul Jairath et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +13

Particulate generation in silane/ammonia rf discharges

H. Anderson, Rahul Jairath, Joseph L. Mock · Journal of Applied Physics · 1990 · 62 citations

Natural Sciences, Materials Science, Physics +15

Consumables for the Chemical Mechanical Polishing (Cmp) of Dielectrics and Conductors

Rahul Jairath, Mukesh Desai, Matt Stell et al. · MRS Proceedings · 1994 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +12

Effect of Polishing Pad Material Properties on Chemical Mechanical Polishing (Cmp) Processes

Rajeev Bajaj, Mukesh Desai, Rahul Jairath et al. · MRS Proceedings · 1994 · 48 citations

Engineering, Materials Engineering, Materials Science +13

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