P. Renteln

The Evolution of Chem-Mechanical Planarization: From Aberrant to Prosaic

P. Renteln, John Coniff · MRS Proceedings · 1994 · 15 citations

Natural Sciences, Chemistry, Physical Chemistry +5

Application of run by run controller to the chemical-mechanical planarization process. II

He Du, S.S. Wong, P. Renteln et al. · 2002 · 15 citations

Engineering, Manufacturing Engineering, Materials Processing +14

Application of Run by Run controller to the chemical-mechanical planarization process. I

Emanuel M. Sachs, P. Renteln · 2002 · 12 citations

Engineering, Chemical Engineering, Process Control +14

Characterization of mechanical planarization processes

P. Renteln, Michael E. Thomas, John M. Pierce · 2002 · 11 citations

Engineering, Electrical Engineering, Materials Science +13

An Exploration of the Copper CMP Removal Mechanism

P. Renteln, Ton Ninh · MRS Proceedings · 1999 · 11 citations

Engineering, Materials Engineering, Materials Science +7