Concepedia

Robert Tolles

RT

4

Publications

134

Citations

4

H-Index

1992

Active since

Affiliations

Cabot (United States)(Current)

Robert Tolles is an author at Cabot (United States) specializing in mechanical engineering, engineering, and material processing.

Top concepts

EngineeringMaterial ScienceSurface PolishingMaterial ProcessingMechanical EngineeringCorrosionChemical EngineeringMaterials EngineeringMicrostructureSurface Science

Publications per year

1992–2002

4

Publications

4

Consumables for the Chemical Mechanical Polishing (Cmp) of Dielectrics and Conductors

Rahul Jairath, Mukesh Desai, Matt Stell et al. · MRS Proceedings · 1994 · 48 citations

Materials Science, Chemical Engineering, Engineering +9

Effect of Polishing Pad Material Properties on Chemical Mechanical Polishing (Cmp) Processes

Rajeev Bajaj, Mukesh Desai, Rahul Jairath et al. · MRS Proceedings · 1994 · 47 citations

Materials Science, Materials Engineering, Chemical Engineering +11

Chemical Mechanical Polishing of Interlevel Dielectrics: Models for Removal Rate and Planarity

Siva Sivaram, Robert Tolles, Hubert Bath et al. · MRS Proceedings · 1992 · 28 citations

Materials Engineering, Materials Science, Engineering +11

Development of a production worthy copper CMP process

K. Wijekoon, Sandeep Kumar Mishra, Stan Tsai et al. · 2002 · 11 citations

Engineering, Industrial Engineering, Mechanical Engineering +17

Rows per page

1–4 of 4