K. Wijekoon

Copper CMP integration and time dependent pattern effect

Jianbing Pan, Ping Li, K. Wijekoon et al. · 2003 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +6

Production ready noval texture etching process for fabrication of single crystalline silicon solar cells

K. Wijekoon, Timothy W. Weidman, S. Paak et al. · 2010 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Texture process monitoring in solar cell manufacturing using optical metrology

V. Velidandla, Jim Xu, Zhen Hou et al. · 2011 · 13 citations

Engineering, Materials Engineering, Materials Science +17

Defect and electromigration characterization of a two level copper interconnect

S. Parikh, J. L. Educato, A. Wang et al. · 2001 · 12 citations

Engineering, Electrical Engineering, Materials Engineering +15

Development of a production worthy copper CMP process

K. Wijekoon, Sandeep Kumar Mishra, Stan Tsai et al. · 2002 · 11 citations

Engineering, Materials Engineering, Materials Science +16