Accurate and traceable measurement of nano- and microstructures

Abstract

An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures—such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter—and microstructures—such as microgroove, microroughness and geometry of a macrohardness indenter—is given in this paper.