IEEE Transactions on Electron Devices · 1985 · 92 citations · 6 references
EngineeringComputer EngineeringElectrical EngineeringCircuit TheoryMicroelectronicsStochastic ModelingDefect ModelingDefectsDevice ModelingYield AnalysisYield EstimationYield PredictionDefect DensityDefect Size AssessmentDefect Size EffectsStatistical Yield Modeling
Most publications on yield modeling for large-scale integrated circuits have concerned themselves only with the role of the spatial distribution of defects. While it was recognized that the size of the defects affected the yield, the role of the size distribution does not appear to have been fully investigated. This paper examines the effect of different assumptions concerning the defect size distribution and shows that they exert a strong effect on the projected yield. It is also shown that attempts to determine the defect size distribution from yield data are subject to fundamental limitations that need to be addressed.
6
A new look at yield of integrated circuits
J.E. Price · Proceedings of the IEEE · 1970 · 104 citations
Engineering, Computer Engineering, Electrical Engineering +10