MEMS actuators and sensors: observations on their performance and selection for purpose

TLDR

The paper compares MEMS actuator and sensor performance across operating principles. The authors compiled literature data on MEMS actuator and sensor performance, grouped devices by operating principle, and built performance maps of force, displacement, resolution, and frequency to compare MEMS with macroscopic counterparts. The resulting performance maps serve as a preliminary design tool, demonstrated by a case study designing an on‑chip tensile test machine for thin‑film materials.

Abstract

This paper presents an exercise in comparing the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle. Data have been obtained from the literature for the mechanical performance characteristics of actuators, force sensors and displacement sensors. On-chip and off-chip actuators and sensors are each sub-grouped into families, classes and members according to their principle of operation. The performance of MEMS sharing common operating principles is compared with each other and with equivalent macroscopic devices. The data are used to construct performance maps showing the capability of existing actuators and sensors in terms of maximum force and displacement capability, resolution and frequency. These can also be used as a preliminary design tool, as shown in a case study on the design of an on-chip tensile test machine for materials in thin-film form.