Concepedia

The effect of post-annealing on the electrical properties of (Pb,Sr)TiO3 thin films prepared by liquid source misted chemical deposition for ultra large-scale integration (ULSI) dynamic random access memory (DRAM) capacitor

Hoon‐Ju Chung

Thin Solid Films · 2001 · 29 citations · 8 references

DOI

Concepts

References

8

Fatigue-free ferroelectric capacitors with platinum electrodes

C. A-Paz de Araujo, J. D. Cuchiaro, L. D. McMillan et al. · Nature · 1995 · 2.6K citations

, , +14

Improvement of leakage currents of Pt/(Ba, Sr)TiO3/Pt capacitors

Jae‐Hyun Joo, Jeong-Min Seon, Yoo-Chan Jeon et al. · Applied Physics Letters · 1997 · 98 citations

, , +17

(Ba, Sr)TiO<sub>3</sub> Films Prepared by Liquid Source Chemical Vapor Deposition on Ru Electrodes

Takaaki Kawahara, Mikio Yamamuka, Akimasa Yuuki et al. · Japanese Journal of Applied Physics · 1996 · 95 citations

, , +17

Fabrication and electrical properties of sol-gel derived BaTiO3 films with metallic LaNiO3 electrode

Aidong Li, Chuan-zhen Ge, Peng Lü et al. · Applied Physics Letters · 1997 · 89 citations

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Effects of crystallization on structural and dielectric properties of thin amorphous films of (1−<i>x</i>)BaTiO3-<i>x</i>SrTiO3 (<i>x</i>=0–0.5, 1.0)

Hiroaki Kawano, K. Morii, Y. Nakayama · Journal of Applied Physics · 1993 · 53 citations

, , +17