Fabrication and electrical properties of sol-gel derived BaTiO3 films with metallic LaNiO3 electrode

Abstract

Metallic LaNiO3 (LNO) films were prepared on LaAlO3 (LAO) by metalorganic decomposition (MOD) and their application as the bottom electrode in sol-gel derived BaTiO3 (BTO) thin film was studied by means of x-ray diffraction, Raman spectroscopy, and scanning electron microscopy. BTO film on LNO-coated LAO exhibited preferred (100) orientation and smooth surface with fine grains (∼50 nm). Electrical measurements on BTO film capacitor showed good ferroelectric hysteresis, lower loss tangent and good insulating properties. These results indicated the BTO/LNO heterostructure fabricated by sol-gel and MOD technique to be a promising combination for microelectronic device applications.