Concepedia

Development of a rapid and automated TEM sample preparation method in semiconductor failure analysis and the study of the relevant TEM artifact

Jiyan Dai, S.F. Tee, Chui Lam Tay, Zhigang Song, Shaheer Ansari, E. Er, S. Redkar

Microelectronics Journal · 2001 · 18 citations · 4 references

DOI

References

4

Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam

M.H.F. Overwijk, F.C. van den Heuvel, C. W. T. Bulle‐Lieuwma · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 256 citations

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Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation

Lucille A. Giannuzzi, J. L. Drown, S. R. Brown et al. · MRS Proceedings · 1997 · 156 citations

, , +9

What limits the application of TEM in the semiconductor industry?

Hong Zhang · Thin Solid Films · 1998 · 22 citations

, , +4

TEM Sample Preparation Using A Focused Ion Beam and A Probe Manipulator

Lowell Herlinger, S. Chevacharoenkul, D Erwin · Proceedings - International Symposium for Testing and Failure Analysis · 1996 · 21 citations

, , +22