15
Publications
311
Citations
11
H-Index
1986
Active since
S. Chevacharoenkul is an author at North Carolina State University specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrostructureMicroelectronicsElectrical EngineeringCrystalline DefectsMechanics Of MaterialsThin FilmsNanoelectronics
Publications per year
1986–2017
15
15
Controlled ion beam sputter deposition of W/Cu/W layered films for microelectronic applications
Orlando Auciello, S. Chevacharoenkul, M. S. Ameen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 46 citations
Engineering, Microelectronic Applications, Vacuum Device +16
Rows per page
1–5 of 15