Concepedia

The generic nature of the Smart-Cut® process for thin film transfer

B. Aspar, H. Moriceau, E. Jalaguier, C. Lagahe, A. Soubie, B. Biasse, A.M. Papon, A. Claverie, J. Grisolia, G. Benassayag,

Journal of Electronic Materials · 2001 · 109 citations · 16 references

DOI

Concepts

References

16

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 1K citations

, , +16

On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures

Astrid Van Wieringen, N. Warmoltz · Physica · 1956 · 596 citations

, , +14

Hydrogen transport in amorphous silicon

W. B. Jackson, C. C. Tsai · Physical review. B, Condensed matter · 1992 · 159 citations

, , +17

Basic mechanisms involved in the Smart-Cut® process

B. Aspar, M. Bruel, H. Moriceau et al. · Microelectronic Engineering · 1997 · 139 citations

, , +10

A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si

J. Grisolia, Gérard Assayag, A. Claverie et al. · Applied Physics Letters · 2000 · 125 citations

, , +17