A. Soubie

The generic nature of the Smart-Cut® process for thin film transfer

B. Aspar, H. Moriceau, E. Jalaguier et al. · Journal of Electronic Materials · 2001 · 108 citations

Materials Science, Engineering, Smart-cut® Process +8

"Smart cut": a promising new SOI material technology

M. Bruel, B. Aspar, Barbara Charlet et al. · 2002 · 56 citations

Engineering, Material Innovation, Vacuum Device +18

Smart-Cut® Technology: an Industrial Application of Ion Implantation Induced Cavities

B. Aspar, C. Lagahe, H. Moriceau et al. · MRS Proceedings · 1998 · 22 citations

Ion Implantation, Implantable Device, Engineering +5

New layer transfers obtained by the SmartCut process

H. Moriceau, Frank Fournel, B. Aspar et al. · Journal of Electronic Materials · 2003 · 19 citations

New Layer Transfers, Engineering, Computer Engineering +5

High energy ion implantation for C-MOS isolation n-wells technology: Problems related to the use of multicharged phosphorous ions in an industrial context

P. Spinelli, J. Escaron, A. Soubie et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 16 citations

Materials Science, Electrical Engineering, Ion Implantation +8