Film modification by low energy ion bombardment during deposition

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

Natural Sciences, Materials Science, Physics +17

Ion-beam-induced epitaxial vapor-phase growth: A molecular-dynamics study

Karl‐Heinz Müller · Physical review. B, Condensed matter · 1987 · 312 citations

Natural Sciences, Materials Science, Physics +17

Ion-beam-assisted deposition of thin films

Peter Martin, H. A. Macleod, R. P. Netterfield et al. · Applied Optics · 1983 · 281 citations

Natural Sciences, Materials Engineering, Materials Science +16

Theory of thin-film orientation by ion bombardment during deposition

R. Mark Bradley, James Harper, D. A. Smith · Journal of Applied Physics · 1986 · 236 citations

Natural Sciences, Materials Science, Physics +15