Journal of Crystal Growth · 2005 · 89 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAluminum OxidesChemical Vapor DepositionCrystal GrowthEpitaxial GrowthMetalsThin-film MaterialsEpitaxial Film GrowthEpitaxial Growth KineticsEpitaxial Thin-film GrowthHydride Vapor Phase EpitaxyThin-film Growth Mechanisms
13
Growth of high purity AlN crystals
Glen A. Slack, T. McNelly · Journal of Crystal Growth · 1976 · 450 citations
Natural Sciences, Materials Engineering, Materials Science +12