Concepedia

Synthesis of SrTiO<sub>3</sub> by crystallization of SrO/TiO<sub>2</sub> superlattices prepared by atomic layer deposition

S. Riedel, J. Neidhardt, Sören Jansen, L. Wilde, Jonas Sundqvist, Elke Erben, S. Teichert, A. Michaelis

Journal of Applied Physics · 2011 · 15 citations · 16 references

DOI

Concepts

Abstract

Art. 094101, 8 S.

References

16

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.6K citations

, , +17

Systematic XPS studies of metal oxides, hydroxides and peroxides

Jean‐Charles Dupin, D. Gonbeau, Philippe Vinatier et al. · Physical Chemistry Chemical Physics · 2000 · 2.2K citations

, , +15

Schottky barrier heights of tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalate

John Robertson, C. W. Chen · Applied Physics Letters · 1999 · 372 citations

, , +17

X-ray photoelectron spectroscopy study of Sr and Ba compounds

R. P. Vasquez · Journal of Electron Spectroscopy and Related Phenomena · 1991 · 281 citations

, , +12

High-k dielectrics for future generation memory devices (Invited Paper)

J. A. Kittl, Karl Opsomer, M. Popovici et al. · Microelectronic Engineering · 2009 · 250 citations

, , +16