Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 23 citations · 5 references
MedicineOrthopedic SurgerySurgerySurgical InstrumentationIon ImplantationNitrogen InjectionSurgical Implantation
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Transient boron diffusion in ion-implanted crystalline and amorphous silicon
T. O. Sedgwick, A. E. Michel, V. R. Deline et al. · Journal of Applied Physics · 1988 · 174 citations
Engineering, Materials Engineering, Materials Science +17
Highly Reliable Thin Nitrided SiO<sub>2</sub> Films Formed by Rapid Thermal Processing in an N<sub>2</sub>O Ambient
Hisashi Fukuda, Tomiyuki Arakawa, Seigo Ohno · Japanese Journal of Applied Physics · 1990 · 106 citations
Elimination of end-of-range and mask edge lateral damage in Ge+ preamorphized, B+ implanted Si
A. Ajmera, G. A. Rozgonyi · Applied Physics Letters · 1986 · 100 citations
Effect of rapid thermal reoxidation on the electrical properties of rapid thermally nitrided thin-gate oxides
Atul Joshi, Guo-Qiang Lo, D. K. Shih et al. · IEEE Transactions on Electron Devices · 1992 · 32 citations
Engineering, Electrical Engineering, Materials Science +17
Photoluminescence Associated with Nitrogen in Silicon
Michio Tajima, T. Masui, Takao Abé et al. · Japanese Journal of Applied Physics · 1981 · 31 citations
Engineering, Materials Engineering, Materials Science +13