Electron temperature measurements in plasmas with surface wave absorption and wave cutoff frequency

Abstract

A method for the measurements of electron temperature in the plasma using cutoff frequency and surface wave absorption frequency is described. The cutoff frequency, which gives directly the plasma density, is obtained from the transmission spectrum measured between two antennas exposed to the plasma. The surface wave absorption frequency, which has the information of the sheath determined by the electron density and the electron temperature, is obtained from the reflection spectrum measured at radiating antenna. The electron temperature is derived from the dispersion equation of the surface wave with the electron density measured from cutoff frequency.