A MEMS electron impact ion source integrated in a microtime-of-flight mass spectrometer

Monolithic MEMS quadrupole mass spectrometers by deep silicon etching

M.C. Geear, R.R.A. Syms, Steven L. Wright et al. · Journal of Microelectromechanical Systems · 2005 · 117 citations

Engineering, Electrical Engineering, Materials Science +17

Complex MEMS: a fully integrated TOF micro mass spectrometer

Eric Wapelhorst, Jan-Peter Hauschild, Jörg Müller · Sensors and Actuators A Physical · 2007 · 72 citations

Engineering, Chemistry, Mechatronics Engineering +14

Surface microstructure/miniature mass spectrometer:.processing and applications

P. Siebert, Guillermo Petzold, Á. Hellenbart et al. · Applied Physics A · 1998 · 61 citations

Natural Sciences, Materials Engineering, Materials Science +12

Chemical sensing using nonoptical microelectromechanical systems

C. B. Freidhoff, Robert M. Young, Sharath Sriram et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 60 citations · Full text

Engineering, Chemical Engineering, Mechanical Engineering +16

Fabrication of a novel micro time-of-flight mass spectrometer

Hyeun Joong Yoon, Jung Hoon Kim, Eun Soo Choi et al. · Sensors and Actuators A Physical · 2002 · 58 citations

Engineering, Materials Science, Analytical Chemistry +11