Sensors and Actuators A Physical · 2002 · 58 citations · 10 references
EngineeringMaterials ScienceAnalytical ChemistryInstrumentationMicrofabricationMass AnalyzersMass SpectrometryMems FabricationMicrofabrication ProcessesMicrofluidicsMicromachiningMiniaturized Mass AnalyzersTime-of-flight Mass AnalyzersTime-of-flight Mass Spectrometry
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Anisotropic etching of silicon in TMAH solutions
Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations
A new Method of Positive Ray Analysis
A. J. Dempster · Physical Review · 1918 · 362 citations
Micro ion trap mass spectrometry
Oleg Kornienko, Peter T. A. Reilly, William B. Whitten et al. · Rapid Communications in Mass Spectrometry · 1999 · 108 citations