Analysis and Kinetics of Transient Species in Electrode Near Plasma and Plasma Boundary Sheath of RF Plasmas in Molecular Gases

Abstract

Abstract Modern diagnostic methods are applied for investigation of spatial and temporal behaviour of selected reactive species in oxygen and fluorocarbon rf plasmas. Comprehensive investigations of the spatial distribution of atomic oxygen were done by means of two‐photon absorption laser induced fluorescence spectroscopy. Exemplarily, axial and radial O‐concentrations are shown for an asymmetric capacitively coupled rf plasma in pure oxygen. The time resolved threshold ionization mass spectrometry was applied for investigation of small fluorocarbon radicals. In pulsed CF 4 /H 2 rf plasma the concentrations of the extracted radicals CF 2 , CF 3 , C 2 F 5 as well as the intermediate product C 2 F 4 in the plasma on and off phase are presented. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)