Concepedia

Characterizing the remote plasma polymerization of octafluorocyclobutane induced by RF-driven hollow-cathode discharge

Klaus-Peter Ningel, D. Theirich, J. Engemann

Surface and Coatings Technology · 1998 · 15 citations · 12 references

DOI

Concepts

References

12

Introduction to Infrared and Raman Spectroscopy.

R. C. Lord · Journal of the American Chemical Society · 1965 · 1.4K citations

, , +12

Plasma etching of Si and SiO2—The effect of oxygen additions to CF4 plasmas

C. J. Mogab, A. C. Adams, Daniel Flamm · Journal of Applied Physics · 1978 · 565 citations

, , +14

Microwave Plasma Etching

Keizô Suzuki, Sadayuki Okudaira, N. Sakudo et al. · Japanese Journal of Applied Physics · 1977 · 236 citations

, , +13

The Molecular Structure of Perfluorocarbon Polymers. Infrared Studies on Polytetrafluoroethylene<sup>1</sup>

Robert E. Moynihan · Journal of the American Chemical Society · 1959 · 230 citations

, , +13

The hollow-cathode effect and the theory of glow discharges

P. F. Little, A. Engel · Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1954 · 219 citations

, , +11