20
Publications
670
Citations
16
H-Index
1994
Active since
D. Theirich is an author at University of Wuppertal specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemistryThin FilmsPolymer ScienceChemical EngineeringSurface ModificationPlasma Physics
Publications per year
1994–2022
20
20
Intermediate gas phase precursors during plasma CVD of HMDSO
D. Theirich, Ch. Soll, F. Leu et al. · Vacuum · 2003 · 53 citations
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