Thin Solid Films · 1997 · 99 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsMetal Oxide NanomaterialsOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsMagnetron SputteringSputter DepositionThin Oxide FilmsThin Oxide LayersZinc Oxides
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