Journal of Vacuum Science and Technology · 1979 · 316 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceOptoelectronicsSemiconductor MaterialsThin FilmsPhotovoltaic DevicesPhotovoltaic MaterialsSolar Cell MaterialsSolar CellsThin Film Optical PropertiesThin-film DepositionElectrical PropertiesPhotovoltaic Thin FilmsPyrolysisSolar Cell FabricationSpray PyrolysisThermoelectric PropertiesThin Oxide FilmsZinc Oxides
Zinc oxide films were produced by spray pyrolysis starting with aqueous solutions of ZnCl2, ZnCl2 plus H2O2, and Zn acetate, and structural, optical, electrical, and thermoelectrical properties of the deposited films were investigated. Highly transparent films with resistivity as low as 10−3 Ω cm can be produced by suitable control of deposition procedures and by postdeposition annealing in hydrogen.