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Critical reliability challenges in scaling SiO2-based dielectric to its limit

Materials ScienceElectrical EngineeringEngineeringHardware ReliabilityDevice ReliabilityApplied PhysicsTime-dependent Dielectric BreakdownCritical Reliability ChallengesElectronic PackagingSilicon On InsulatorMicroelectronicsPhysic Of FailureElectrical Insulation