A test object with a line width less than 10 nm for scanning electron microscopy

Critical issues in scanning electron microscope metrology

Michael T. Postek · Journal of Research of the National Institute of Standards and Technology · 1994 · 71 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +12

An electron optical metrology system for pattern placement measurements

Wolfgang Häßler‐Grohne, Harald Bosse · Measurement Science and Technology · 1998 · 69 citations

Engineering, Manufacturing Engineering, Instrumentation +16

SEM-based System For Calibration Of Linewidth SRMs For The IC industry

Diana Nyyssonen, Michael T. Postek · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1986 · 16 citations

Engineering, Electrical Engineering, Instrumentation +16

<title>Linear sizes measurements of relief elements with the width less than 100 nm on a SEM</title>

Yu. A. Novikov, A. V. Rakov · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +12