Concepedia

Yu. V. Ozerin

YV

Statistics

Publications

6

Citations

150

H-Index

6

Active since

2004

Affiliations

Mikron (Russia)(Current)

Prokhorov General Physics Institute

Research Center for Surface and Vacuum (Russia)

Russian Academy of Sciences

Research Institute of Molecular Electronics

Yu. V. Ozerin is an author at Mikron (Russia) specializing in materials science, materials engineering, and electron microscopy.

Publications per year

2004–2011

6

Publications

6

SEM Linear Measurement in a Wide Magnification Range

Ch. P. Volk, E. S. Gornev, Yu. A. Novikov et al. · Russian Microelectronics · 2004 · 32 citations

, , +4

Silicon test object of the linewidth of the nanometer range for SEM and AFM

Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 29 citations

, , +17

Method for linear measurements in the nanometre range

Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov · Measurement Science and Technology · 2007 · 28 citations

, , +16

Test object of the linewidth with a trapezoidal profile and three certified sizes for an SEM and AFM

V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin et al. · Measurement Science and Technology · 2009 · 26 citations

, , +17

A test object with a line width less than 10 nm for scanning electron microscopy

M. A. Danilova, V. B. Mityukhlyaev, Yu. A. Novikov et al. · Measurement Techniques · 2008 · 23 citations

, , +7

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