Concepedia

Ch. P. Volk

CP

3

Publications

63

Citations

3

H-Index

2004

Active since

Affiliations

Mikron (Russia)(Current)

Research Institute of Molecular Electronics

Russian Academy of Sciences

Prokhorov General Physics Institute

Ch. P. Volk is an author at Mikron (Russia) specializing in instrumentation, calibration, and microscopy.

Top concepts

Publications per year

2004–2009

3

Publications

3

SEM Linear Measurement in a Wide Magnification Range

Ch. P. Volk, E. S. Gornev, Yu. A. Novikov et al. · Russian Microelectronics · 2004 · 32 citations

, , +7

Calibration of a scanning electron microscope in the wide range of magnifications for the microscope operation in the integrated circuit production line

Yu. A. Novikov, A. V. Rakov, Ch. P. Volk · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 19 citations

, , +20

Calibrating a scanning electron microscope in two coordinates by the use of one certified dimension

Ch. P. Volk, Yu. A. Novikov, A. V. Rakov · Measurement Techniques · 2008 · 12 citations

, , +12

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