Wolfgang Häßler‐Grohne

An electron optical metrology system for pattern placement measurements

Wolfgang Häßler‐Grohne, Harald Bosse · Measurement Science and Technology · 1998 · 68 citations

Engineering, Electron-beam Lithography, Microscopy +19

Development of a 3D-AFM for true 3D measurements of nanostructures

Gaoliang Dai, Wolfgang Häßler‐Grohne, Dorothee Hüser et al. · Measurement Science and Technology · 2011 · 47 citations

Engineering, Afm Tip, Microscopy +20

Current limitations of SEM and AFM metrology for the characterization of 3D nanostructures

Wolfgang Häßler‐Grohne, Dorothee Hüser, Klaus‐Peter Johnsen et al. · Measurement Science and Technology · 2011 · 35 citations

Engineering, Microscopy, Oscillation Mode Afms +23

SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 µm

C. G. Frase, Wolfgang Häßler‐Grohne, Gaoliang Dai et al. · Measurement Science and Technology · 2007 · 31 citations

Afm Measurements, Engineering, Measurement +19

Final report on CCL-S3 supplementary line scale comparison Nano3

Harald Bosse, Wolfgang Häßler‐Grohne, Jens Flügge et al. · Metrologia · 2003 · 23 citations

Materials Science, Nanoscale System, Engineering +13