Wolfgang Häßler‐Grohne

Author

Also Known As

Hermann Groß, Häßler-Grohne, Wolfgang, W Häßler-Grohne, W. Hassler-Grohne, W. Hässler-Grohne, W. Häßler-Grohne, W. Häßler‐Grohne, Wolfgang Hassler-Grohne, Wolfgang Hässler-Grohne, Wolfgang Häßler-Grohne

Publications

307

Citations

H-Index

Concepts

All Affiliations

Physikalisch-Technische Bundesanstalt

About

Wolfgang Häßler‐Grohne is an author at Physikalisch-Technische Bundesanstalt specializing in engineering, applied physics, and microscopy.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	6	6	225
2	Applied Physics	6	6	225
3	Education	2	2	99
4	Medicine	1	1	35
5	Electrical Engineering	1	1	31

Wolfgang Häßler‐Grohne

Publications

237

Citations

H-Index

Page 1

	Year	Citations
An electron optical metrology system for pattern placement measurements Wolfgang Häßler‐Grohne, Harald Bosse Measurement Science and Technology EngineeringElectron-beam LithographyMicroscopyMeasurementOverlay Measurements	1998	68
Development of a 3D-AFM for true 3D measurements of nanostructures Gaoliang Dai, Wolfgang Häßler‐Grohne, Dorothee Hüser, Measurement Science and Technology EngineeringAfm TipMicroscopyMechanical EngineeringNanometrology	2011	47
Current limitations of SEM and AFM metrology for the characterization of 3D nanostructures Wolfgang Häßler‐Grohne, Dorothee Hüser, Klaus‐Peter Johnsen, Measurement Science and Technology EngineeringMicroscopyOscillation Mode AfmsAfm MetrologyElectron Microscopy	2011	35
SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 µm C. G. Frase, Wolfgang Häßler‐Grohne, Gaoliang Dai, Measurement Science and Technology Afm MeasurementsEngineeringMeasurementMicroscopyEducation	2007	31
Final report on CCL-S3 supplementary line scale comparison Nano3 Harald Bosse, Wolfgang Häßler‐Grohne, Jens Flügge, Metrologia Materials ScienceNanoscale SystemEngineeringNanomaterialsNanotechnology	2003	23
Use of Monte Carlo models in the development and validation of CD operators C. G. Frase, Wolfgang Häßler‐Grohne Surface and Interface Analysis EngineeringMicroscopyMonte Carlo MethodsMarkov Chain Monte CarloCd Operators	2005	21
Results of a round robin measurement on a new CD mask standard Fritz Gans, Roman Liebe, Jan Richter, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2005	12

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