Final report on CCL-S3 supplementary line scale comparison Nano3

Abstract

This report describes the results of the international line scale comparison Nano3, which was carried out between 2000 and 2003 and which was accepted as supplementary comparison CCL-S3. This comparison was initiated by the BIPM working group on nanometrology as one of five international comparisons in the field of dimensional nanometrology. Two high quality line scales, one made of Zerodur and one made of fused silica (quartz), with 280 mm main graduation length and additional smaller graduations of only a few mm were chosen as transfer standards. These scales were produced using advanced and optimized lithography and processing technologies by the Dr Johannes Heidenhain GmbH, Germany. A considerable number of characterizations of the graduations were performed in order to ensure an optimized line edge quality of the scales used in the comparison. Moreover, it was decided to have long gauge blocks manufactured out of the same piece of substrate material as was used for the scales. In this way, it was possible to independently determine important substrate material parameters like thermal expansion, compressibility and to investigate the long-term stability of the substrate materials.