Concepedia

Measurement of superlattice optical properties by variable angle spectroscopic ellipsometry

Paul G. Snyder, Bhola N. De, Kenneth G. Merkel, John A. Woollam, D. W. Langer, C. E. Stutz, R. Jones, K. R. Evans

Superlattices and Microstructures · 1988 · 13 citations · 9 references

DOI

Concepts

References

9

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

, , +13

Dielectric functions and optical parameters of Si, Ge, GaP, GaAs, GaSb, InP, InAs, and InSb from 1.5 to 6.0 eV

D. E. Aspnes, A. A. Studna · Physical review. B, Condensed matter · 1983 · 4K citations

, , +17

Ellipsometry and Polarized Light

L. Cox · Optica Acta International Journal of Optics · 1978 · 1.9K citations

, , +9

Precision Bounds to Ellipsometer Systems

D. E. Aspnes · Applied Optics · 1975 · 268 citations

, , +9

Variable angle of incidence spectroscopic ellipsometry: Application to GaAs-Al<i>x</i>Ga1−<i>x</i>As multiple heterostructures

Paul G. Snyder, M. Rost, George H. Bu-Abbud et al. · Journal of Applied Physics · 1986 · 124 citations

, , +17