Concepedia

Oxygen precipitate precursors and size thresholds for the preferential nucleation for copper and nickel precipitation in silicon: the detection of copper and nickel contamination by minority carrier lifetime methods

A. Bazzali, G. Borionetti, R. Orizio, D. Gambaro, R. Falster

Materials Science and Engineering B · 1996 · 14 citations · 6 references

DOI

Concepts

References

6

Minority Carrier Diffusion Length Mapping in Silicon Wafers Using a Si‐Electrolyte‐Contact

V. Lehmann, H. Föll · Journal of The Electrochemical Society · 1988 · 98 citations

, , +19

Gettering thresholds for transition metals by oxygen-related defects in silicon

R. Falster, Graham R. Fisher, Giuliana Ferrero · Applied Physics Letters · 1991 · 57 citations

, , +17

The Gettering of Transition Metals by Oxygen‐Related Defects in Silicon

R. Falster, W. Bergholz · Journal of The Electrochemical Society · 1990 · 44 citations

, , +19

Palladium-Test: A Tool to Evaluate Gettering Efficiency

K. Graff, H.-A. Hefner, Henning Pieper · MRS Proceedings · 1984 · 19 citations

, , +3

Gettering and Gettering Stability of Metals at Oxide Particles in Silicon

R. Falster, Z. Laczik, G. R. Booker et al. · MRS Proceedings · 1992 · 17 citations

, , +6