Gettering and Gettering Stability of Metals at Oxide Particles in Silicon - Concepedia

Concepedia

Publication | Closed Access

Gettering and Gettering Stability of Metals at Oxide Particles in Silicon

17

Citations

8

References

1992

Year

R. Falster, Z. Laczik, G. R. Booker, A. R. Bhatti, Péter Török

MRS Proceedings

Materials EngineeringMaterials ScienceGettering StabilityOxide ParticlesSinteringEngineeringApplied PhysicsSilicon On InsulatorMicrostructure

References

	Year	Citations

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